MO

Masaru Ohto

MC Mitsubishi Gas Chemical Company: 10 patents #181 of 1,727Top 15%
Overall (All Time): #510,467 of 4,157,543Top 15%
10
Patents All Time

Issued Patents All Time

Showing 1–10 of 10 patents

Patent #TitleCo-InventorsDate
9587208 Cleaning liquid composition, method for cleaning semiconductor element, and method for manufacturing semiconductor element Kenji Shimada, Kojiro Abe, Hiroshi Yoshida 2017-03-07
9422512 Cleaning liquid for semiconductor elements and cleaning method using same Kenji Shimada, Toshiyuki Oie, Ryota Nakayama 2016-08-23
9334161 Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same Hiroshi Matsunaga, Kenji Yamada 2016-05-10
9196472 Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same Hiroshi Matsunaga, Kenji Yamada 2015-11-24
8980812 Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid Hiroshi Matsunaga 2015-03-17
8658053 Etching composition for metal material and method for manufacturing semiconductor device by using same Kazuyoshi Yaguchi, Kojiro Abe 2014-02-25
7977292 Cleaning composition and process for producing semiconductor device Hiroshi Matsunaga, Hideo Kashiwagi, Hiroshi Yoshida 2011-07-12
7572758 Cleaning liquid and cleaning method Kenji Shimada, Kojiro Abe, Hiroshi Matsunaga 2009-08-11
6475373 Method of controlling NOx gas emission by hydrogen peroxide Tadashi Shimomura, Hiroya Watanabe 2002-11-05
5185185 Process of pretreatment of metal-plating resin molded articles Chiharu Nishizawa, Yoshiharu Kondo 1993-02-09