Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8883652 | Silicon etching liquid and etching method | Ryuji Sotoaka | 2014-11-11 |
| 8658053 | Etching composition for metal material and method for manufacturing semiconductor device by using same | Kojiro Abe, Masaru Ohto | 2014-02-25 |
| 8562855 | Silicon etching liquid and etching method | Ryuji Sotoaka | 2013-10-22 |