Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8288294 | Insulating film for semiconductor device, process and apparatus for producing insulating film for semiconductor device, semiconductor device, and process for producing the semiconductor device | Hidetaka Kafuku, Toshihito FUJIWARA, Tadashi Shimazu, Naoki Yasuda, Hideharu Nobutoki +4 more | 2012-10-16 |
| 7977243 | Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus | Hitoshi Sakamoto, Naoki Yahata, Ryuichi Matsuda, Yoshiyuki Ooba | 2011-07-12 |
| 7972946 | Plasma treatment method and plasma treatment device | Tadashi Shimazu, Masahiko Inoue, Yuichi Kawano | 2011-07-05 |
| 7923374 | Method and apparatus for production of metal film or the like | Hitoshi Sakamoto, Naoki Yahata, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2011-04-12 |
| 7659209 | Barrier metal film production method | Hitoshi Sakamoto, Naoki Yahata, Ryuichi Matsuda, Yoshiyuki Ooba | 2010-02-09 |
| 7262500 | Interconnection structure | Hitoshi Sakamoto, Naoki Yahata, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2007-08-28 |
| 7208421 | Method and apparatus for production of metal film or the like | Hitoshi Sakamoto, Naoki Yahata, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2007-04-24 |
| 6656540 | Method for forming metallic film and apparatus for forming the same | Hitoshi Sakamoto, Saneyuki Goya, Takao Abe, Noriaki Ueda | 2003-12-02 |