Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9011634 | Plasma processing apparatus and plasma processing method | Ryuichi Matsuda, Masahiko Inoue, Kazuto Yoshida | 2015-04-21 |
| 8889568 | Method and apparatus for producing silicon nitride film | Seiji Nishikawa, Hidetaka Kafuku | 2014-11-18 |
| 8662010 | Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method | Ryuichi Matsuda, Masahiko Inoue | 2014-03-04 |
| 8480912 | Plasma processing apparatus and plasma processing method | Ryuichi Matsuda, Masahiko Inoue, Kazuto Yoshida | 2013-07-09 |
| 8337960 | Seasoning method for film-forming apparatus | Yuichi Kawano | 2012-12-25 |
| 8288294 | Insulating film for semiconductor device, process and apparatus for producing insulating film for semiconductor device, semiconductor device, and process for producing the semiconductor device | Hidetaka Kafuku, Toshihito FUJIWARA, Toshihiko Nishimori, Naoki Yasuda, Hideharu Nobutoki +4 more | 2012-10-16 |
| 7972946 | Plasma treatment method and plasma treatment device | Masahiko Inoue, Toshihiko Nishimori, Yuichi Kawano | 2011-07-05 |
| 7314525 | Plasma CVD apparatus | Masahiko Inoue | 2008-01-01 |