Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977243 | Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus | Hitoshi Sakamoto, Naoki Yahata, Ryuichi Matsuda, Toshihiko Nishimori | 2011-07-12 |
| 7923374 | Method and apparatus for production of metal film or the like | Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2011-04-12 |
| 7776751 | Process for producing silicon compound | Hitoshi Sakamoto | 2010-08-17 |
| 7659209 | Barrier metal film production method | Hitoshi Sakamoto, Naoki Yahata, Ryuichi Matsuda, Toshihiko Nishimori | 2010-02-09 |
| 7262500 | Interconnection structure | Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2007-08-28 |
| 7208421 | Method and apparatus for production of metal film or the like | Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2007-04-24 |
| 6755920 | Low-alloy heat-resistant steel, heat treatment method therefor, and turbine rotor comprising the same | Masatomo Kamada, Akitsugu Fujita, Yoshihiro Okamura, Makoto Yamaguchi | 2004-06-29 |