Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5837094 | Semiconductor manufacturing apparatus | Makoto Doi, Shigemi Miyazaki, Akira Oohisa | 1998-11-17 |
| 5525158 | Thin film deposition apparatus | Goro Oakamoto, Yuki Ito, Kenichiro Yamanishi, Hiroki Ito, Masahiro Hanai +1 more | 1996-06-11 |
| 5211994 | Apparatus for and method of forming thin film | Ken-ichiro Yamanishi | 1993-05-18 |
| 5099791 | Cluster beam thin film deposition apparatus with thermionic electron control | Kenichiro Yamanishi, Seiji Yasunaga | 1992-03-31 |
| 4812326 | Evaporation source with a shaped nozzle | Kenichiro Yamanishi, Seiji Yasunaga | 1989-03-14 |