Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5525158 | Thin film deposition apparatus | Hisashi Tsukazaki, Yuki Ito, Kenichiro Yamanishi, Hiroki Ito, Masahiro Hanai +1 more | 1996-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5525158 | Thin film deposition apparatus | Hisashi Tsukazaki, Yuki Ito, Kenichiro Yamanishi, Hiroki Ito, Masahiro Hanai +1 more | 1996-06-11 |