Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976260 | Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1999-11-02 |
| 5534073 | Semiconductor producing apparatus comprising wafer vacuum chucking device | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1996-07-09 |
| 5525158 | Thin film deposition apparatus | Hisashi Tsukazaki, Goro Oakamoto, Yuki Ito, Hiroki Ito, Masahiro Hanai +1 more | 1996-06-11 |
| 5099791 | Cluster beam thin film deposition apparatus with thermionic electron control | Hisashi Tsukazaki, Seiji Yasunaga | 1992-03-31 |
| 4811690 | Thin film deposition apparatus | Yasuyuki Kawagoe, Seiji Yasunaga | 1989-03-14 |
| 4812326 | Evaporation source with a shaped nozzle | Hisashi Tsukazaki, Seiji Yasunaga | 1989-03-14 |