Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5211994 | Apparatus for and method of forming thin film | Hisashi Tsukazaki | 1993-05-18 |
| 5139625 | Fluid treatment apparatus and method of its shutdown | Masaaki Tanaka, Akira Ikeda, Toshiaki Kobayashi, Shin-ichi Inoue, Shigeki Nakayama | 1992-08-18 |