Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7270715 | Chemical vapor deposition apparatus | Craig M. Carpenter, Philip Campbell, Allen Mardian | 2007-09-18 |
| 7234412 | Semiconductor substrate deposition processor chamber liner apparatus | Craig M. Carpenter, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2007-06-26 |
| 7192487 | Semiconductor substrate processing chamber and accessory attachment interfacial structure | Craig M. Carpenter, Allen Mardian, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2007-03-20 |
| 7185601 | Chemically sensitive warning apparatus and method | Craig M. Carpenter, Allen Mardian, Philip Campbell | 2007-03-06 |
| 7118783 | Methods and apparatus for vapor processing of micro-device workpieces | Craig M. Carpenter, Dan Gealy, Garo Derderian, Allen Mardian | 2006-10-10 |
| 7114669 | Methods of operating a liquid vaporizer | Allen Mardian, Raynald Cantin, Gurtej S. Sandhu | 2006-10-03 |
| 7105208 | Methods and processes utilizing microwave excitation | Craig M. Carpenter, Philip Campbell | 2006-09-12 |
| 7000636 | Valve assemblies for use with a reactive precursor in semiconductor processing | Gurtej S. Sandhu, Allen Mardian | 2006-02-21 |
| 6997403 | Liquid vaporizer with positive liquid shut-off | Allen Mardian, Raynald Cantin, Gurtej S. Sandhu | 2006-02-14 |
| 6980085 | Wireless communication devices and methods of forming and operating the same | — | 2005-12-27 |
| 6955725 | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces | — | 2005-10-18 |
| 6936547 | Gas delivery system for deposition processes, and methods of using same | Weimin Li, Neal R. Rueger, Li Li, Kevin Hamer, Allen Mardian | 2005-08-30 |
| 6935372 | Semiconductor processing reactive precursor valve assembly | Gurtej S. Sandhu, Allen Mardian | 2005-08-30 |
| 6926775 | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces | Craig M. Carpenter, Danny Dynka | 2005-08-09 |
| 6858264 | Chemical vapor deposition methods | Philip Campbell, Craig M. Carpenter, Allen Mardian | 2005-02-22 |
| 6849133 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Craig M. Carpenter, Kevin Hamer | 2005-02-01 |
| 6845734 | Deposition apparatuses configured for utilizing phased microwave radiation | Craig M. Carpenter, Philip Campbell | 2005-01-25 |
| 6838114 | Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces | Craig M. Carpenter, Allen Mardian | 2005-01-04 |
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Craig M. Carpenter, Allen Mardian, Kimberly Tschepen, Garo Derderian | 2004-11-23 |
| 6814813 | Chemical vapor deposition apparatus | Craig M. Carpenter, Philip Campbell, Allen Mardian | 2004-11-09 |
| 6800134 | Chemical vapor deposition methods and atomic layer deposition methods | Gurtej S. Sandhu, Allen Mardian | 2004-10-05 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Allen Mardian, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6797337 | Method for delivering precursors | Craig M. Carpenter, Allen Mardian, Garo Derderian, Dan Gealy | 2004-09-28 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Craig M. Carpenter, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6687969 | Methods of fixturing flexible substrates and methods of processing flexible substrates | — | 2004-02-10 |