| 7387685 |
Apparatus and method for depositing materials onto microelectronic workpieces |
Craig M. Carpenter, Allen Mardian, Ross S. Dando, Garo Derderian |
2008-06-17 |
| 7192487 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure |
Craig M. Carpenter, Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin +2 more |
2007-03-20 |
| 6821347 |
Apparatus and method for depositing materials onto microelectronic workpieces |
Craig M. Carpenter, Allen Mardian, Ross S. Dando, Garo Derderian |
2004-11-23 |
| 6800172 |
INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR |
Craig M. Carpenter, Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin +2 more |
2004-10-05 |
