Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7912671 | Method for measuring the position of a mark in a deflector system | Lars Stiblert | 2011-03-22 |
| 7709165 | Image enhancement for multiple exposure beams | — | 2010-05-04 |
| 7488957 | Pattern generation methods and apparatuses | John-Oskar Larsson | 2009-02-10 |
| 7444616 | Method for error reduction in lithography | Torbjorn Sandstrom | 2008-10-28 |
| 7285365 | Image enhancement for multiple exposure beams | — | 2007-10-23 |
| 7148971 | Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface | Lars Stiblert | 2006-12-12 |
| 6948254 | Method for calibration of a metrology stage | Lars Stiblert | 2005-09-27 |
| 6883158 | Method for error reduction in lithography | Torbjorn Sandstrom, Per Askebjer, Mats Ekberg, Anders Thuren | 2005-04-19 |
| 6844123 | System for production of large area display panels with improved precision | Johan Åman | 2005-01-18 |
| 6700600 | Beam positioning in microlithography writing | Torbjorn Sandstrom, Leif Odselius, Stefan Gullstrand, Mattias Israelsson, Ingvar Andersson | 2004-03-02 |