| 11284517 |
System for direct writing on an uneven surface of a workpiece that is covered with a radiation sensitive layer using exposures having different focal planes |
Mats Rosling |
2022-03-22 |
| 10400634 |
Heat recovery system and a method using a heat recovery system to convert heat into electrical energy |
Thomas Öström, Joachim Karthauser |
2019-09-03 |
| 10149390 |
Maskless writing of a workpiece using a plurality of exposures having different focal planes using multiple DMDs |
Mats Rosling |
2018-12-04 |
| 10082030 |
Thermodynamic cycle operating at low pressure using a radial turbine |
Magnus Genrup, Olle Bergström, Joachim Karthauser, Kari Munukka, Esko Ahlbom |
2018-09-25 |
| 8861066 |
Oversized micro-mechanical light modulator with redundant elements, device and method |
Torbjorn Sandstrom |
2014-10-14 |
| 8537416 |
Rotor optics imaging method and system with variable dose during sweep |
Torbjorn Sandstrom |
2013-09-17 |
| 8531755 |
SLM device and method combining multiple mirrors for high-power delivery |
Torbjorn Sandstrom |
2013-09-10 |
| 7186486 |
Method to pattern a substrate |
Jonathan Walford, Robert H. Eklund |
2007-03-06 |
| 7150949 |
Further method to pattern a substrate |
Hans Fosshaug, Robert H. Eklund, Jonathan Walford |
2006-12-19 |
| 6883158 |
Method for error reduction in lithography |
Torbjorn Sandstrom, Peter Ekberg, Mats Ekberg, Anders Thuren |
2005-04-19 |
