Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11284517 | System for direct writing on an uneven surface of a workpiece that is covered with a radiation sensitive layer using exposures having different focal planes | Mats Rosling | 2022-03-22 |
| 10400634 | Heat recovery system and a method using a heat recovery system to convert heat into electrical energy | Thomas Öström, Joachim Karthauser | 2019-09-03 |
| 10149390 | Maskless writing of a workpiece using a plurality of exposures having different focal planes using multiple DMDs | Mats Rosling | 2018-12-04 |
| 10082030 | Thermodynamic cycle operating at low pressure using a radial turbine | Magnus Genrup, Olle Bergström, Joachim Karthauser, Kari Munukka, Esko Ahlbom | 2018-09-25 |
| 8861066 | Oversized micro-mechanical light modulator with redundant elements, device and method | Torbjorn Sandstrom | 2014-10-14 |
| 8537416 | Rotor optics imaging method and system with variable dose during sweep | Torbjorn Sandstrom | 2013-09-17 |
| 8531755 | SLM device and method combining multiple mirrors for high-power delivery | Torbjorn Sandstrom | 2013-09-10 |
| 7186486 | Method to pattern a substrate | Jonathan Walford, Robert H. Eklund | 2007-03-06 |
| 7150949 | Further method to pattern a substrate | Hans Fosshaug, Robert H. Eklund, Jonathan Walford | 2006-12-19 |
| 6883158 | Method for error reduction in lithography | Torbjorn Sandstrom, Peter Ekberg, Mats Ekberg, Anders Thuren | 2005-04-19 |