| 8067134 |
Method of iterative compensation for non-linear effects in three-dimensional exposure of resist |
Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson |
2011-11-29 |
| 8057971 |
Method of compensation for bleaching of resist during three-dimensional exposure of resist |
Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson |
2011-11-15 |
| 7923182 |
Multi-focus method of enhanced three-dimensional exposure of resist |
Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson |
2011-04-12 |
| 6883158 |
Method for error reduction in lithography |
Torbjorn Sandstrom, Peter Ekberg, Per Askebjer, Anders Thuren |
2005-04-19 |
| 6263124 |
Photoconductive switch |
Pan Min, Mark Irwin, Erik Johansson, Anders Sunesson, Hans Bernhoff +3 more |
2001-07-17 |
| 6226163 |
Device and method relating to protection of an object against over-currents comprising over-current reduction |
Hans Bernhoff, Mikael Bergkvist, Jan Isberg, Mats Leijon, Li Ming +3 more |
2001-05-01 |
