Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9648795 | Pick-and-place tool | Per Gustafsson | 2017-05-09 |
| 9341962 | Method and apparatus for performing pattern alignment to die | Per Gustafsson | 2016-05-17 |
| 9210814 | Apparatuses and methods for compensation of carrier distortions from measurement machines | — | 2015-12-08 |
| 9032611 | Apparatus for generating patterns on workpieces | Per Gustafsson | 2015-05-19 |
| 9032342 | Method and apparatus for alignment optimization with respect to plurality of layers | Per Gustafsson | 2015-05-12 |
| 8934081 | Method and apparatus for performing alignment using reference board | Raoul Zerne | 2015-01-13 |
| 8594824 | Method and apparatus for performing pattern alignment to plurality of dies | Per Gustafsson | 2013-11-26 |
| 8594825 | Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations | Per Gustafsson, Thomas Öström | 2013-11-26 |
| 8530120 | Method and apparatus for performing pattern reconnection after individual or multipart alignment | Per Gustafsson | 2013-09-10 |
| 8137875 | Method and apparatus for overlay compensation between subsequently patterned layers on workpiece | Fredrik Sjostrom | 2012-03-20 |
| 8067134 | Method of iterative compensation for non-linear effects in three-dimensional exposure of resist | Torbjorn Sandstrom, Mats Ekberg, Anders Svensson | 2011-11-29 |
| 8057971 | Method of compensation for bleaching of resist during three-dimensional exposure of resist | Torbjorn Sandstrom, Mats Ekberg, Anders Svensson | 2011-11-15 |
| 7923182 | Multi-focus method of enhanced three-dimensional exposure of resist | Torbjorn Sandstrom, Mats Ekberg, Anders Svensson | 2011-04-12 |