Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8822879 | Writing apparatuses and methods | Torbjorn Sandstrom, Jarek Luberek, Tomas Lock | 2014-09-02 |
| 8160351 | Method and apparatus for mura detection and metrology | Torbjorn Sandstrom | 2012-04-17 |
| 8122846 | Platforms, apparatuses, systems and methods for processing and analyzing substrates | Torbjorn Sandstrom, Jarek Luberek, Tomas Lock | 2012-02-28 |
| 7912671 | Method for measuring the position of a mark in a deflector system | Peter Ekberg | 2011-03-22 |
| 7365829 | Method and apparatus for image formation | Måns Bjuggren, Lars Ivansen | 2008-04-29 |
| 7148971 | Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface | Peter Ekberg | 2006-12-12 |
| 6948254 | Method for calibration of a metrology stage | Peter Ekberg | 2005-09-27 |
| 5631171 | Method and instrument for detection of change of thickness or refractive index for a thin film substrate | Torbjorn Sandstrom, Diana M. Maul | 1997-05-20 |
| 5494829 | Devices and methods for detection of an analyte based upon light interference | Torbjorn Sandstrom, Diana M. Maul | 1996-02-27 |
| 4655595 | Ellipsometric method and apparatus for studying physical properties of the surface of a testpiece | Nils A. N. Bjork, Erland T. Sandstrom, Johan Stenberg | 1987-04-07 |
| 4647207 | Ellipsometric method and apparatus | Nils A. N. Bjork, Erland T. Sandstrom, Johan Stenberg | 1987-03-03 |
| 4558012 | Method and member for detecting and/or measuring the concentration of a chemical substance | B. Hakan Nygren, E. Torbjorn Sandstrom, Johan Stenberg | 1985-12-10 |
| 4332476 | Method and apparatus for studying surface properties | Johan Stenberg, Erland T. Sandstrom | 1982-06-01 |