| 8822879 |
Writing apparatuses and methods |
Torbjorn Sandstrom, Jarek Luberek, Tomas Lock |
2014-09-02 |
| 8160351 |
Method and apparatus for mura detection and metrology |
Torbjorn Sandstrom |
2012-04-17 |
| 8122846 |
Platforms, apparatuses, systems and methods for processing and analyzing substrates |
Torbjorn Sandstrom, Jarek Luberek, Tomas Lock |
2012-02-28 |
| 7912671 |
Method for measuring the position of a mark in a deflector system |
Peter Ekberg |
2011-03-22 |
| 7365829 |
Method and apparatus for image formation |
Måns Bjuggren, Lars Ivansen |
2008-04-29 |
| 7148971 |
Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface |
Peter Ekberg |
2006-12-12 |
| 6948254 |
Method for calibration of a metrology stage |
Peter Ekberg |
2005-09-27 |
| 5631171 |
Method and instrument for detection of change of thickness or refractive index for a thin film substrate |
Torbjorn Sandstrom, Diana M. Maul |
1997-05-20 |
| 5494829 |
Devices and methods for detection of an analyte based upon light interference |
Torbjorn Sandstrom, Diana M. Maul |
1996-02-27 |
| 4655595 |
Ellipsometric method and apparatus for studying physical properties of the surface of a testpiece |
Nils A. N. Bjork, Erland T. Sandstrom, Johan Stenberg |
1987-04-07 |
| 4647207 |
Ellipsometric method and apparatus |
Nils A. N. Bjork, Erland T. Sandstrom, Johan Stenberg |
1987-03-03 |
| 4558012 |
Method and member for detecting and/or measuring the concentration of a chemical substance |
B. Hakan Nygren, E. Torbjorn Sandstrom, Johan Stenberg |
1985-12-10 |
| 4332476 |
Method and apparatus for studying surface properties |
Johan Stenberg, Erland T. Sandstrom |
1982-06-01 |
