Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261635 | Method for controlling air over a spinning microelectronic substrate | — | 2001-07-17 |
| 6232247 | Substrate coating apparatus and semiconductor processing method of improving uniformity of liquid deposition | Brian F. Gordon | 2001-05-15 |
| 6171401 | Process liquid dispense apparatus | — | 2001-01-09 |
| 5925410 | Vibration-enhanced spin-on film techniques for semiconductor device processing | Salman Akram, William T. Rericha | 1999-07-20 |
| 5912049 | Process liquid dispense method and apparatus | — | 1999-06-15 |
| 5849435 | Method for forming a thin uniform layer of resist for lithography | Salman Akram, William T. Rericha | 1998-12-15 |
| 5609995 | Method for forming a thin uniform layer of resist for lithography | Salman Akram, William T. Rericha | 1997-03-11 |