Issued Patents All Time
Showing 151–175 of 207 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764895 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2004-07-20 |
| 6757153 | Thin film structure that may be used with an adhesion layer | — | 2004-06-29 |
| 6744138 | RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-06-01 |
| 6737317 | Method of manufacturing a capacitor having RuSixOy-containing adhesion layers | Brenda D. Kraus | 2004-05-18 |
| 6737313 | Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer | Brenda D. Kraus | 2004-05-18 |
| 6713760 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2004-03-30 |
| 6690055 | Devices containing platinum-rhodium layers and methods | Stefan Uhlenbrock | 2004-02-10 |
| 6677252 | Methods for planarization of non-planar surfaces in device fabrication | — | 2004-01-13 |
| 6673701 | Atomic layer deposition methods | Brian A. Vaartstra, Paul Castrovillo, Cem Basceri, Garo Derderian, Gurtej S. Sandhu | 2004-01-06 |
| 6660631 | Devices containing platinum-iridium films and methods of preparing such films and devices | — | 2003-12-09 |
| 6656835 | Process for low temperature atomic layer deposition of Rh | Stefan Uhlenbrock | 2003-12-02 |
| 6642567 | Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices | — | 2003-11-04 |
| 6626999 | Vapor forming devices | — | 2003-09-30 |
| 6617634 | RuSixOy-containing adhesion layers and process for fabricating the same | Brenda D. Kraus | 2003-09-09 |
| 6610568 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2003-08-26 |
| 6583022 | Methods of forming roughened layers of platinum and methods of forming capacitors | — | 2003-06-24 |
| 6569689 | Method of forming a capacitor | — | 2003-05-27 |
| 6541067 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same | Stefan Uhlenbrock | 2003-04-01 |
| 6528786 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2003-03-04 |
| 6517616 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Stefan Uhlenbrock | 2003-02-11 |
| 6506666 | Method of fabricating an SrRuO3 film | — | 2003-01-14 |
| 6495458 | Method for producing low carbon/oxygen conductive layers | — | 2002-12-17 |
| 6462367 | RuSixOy-containing adhesion layers | Brenda D. Kraus | 2002-10-08 |
| 6461909 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2002-10-08 |
| 6455423 | Direct writing of low carbon conductive material | — | 2002-09-24 |