Issued Patents All Time
Showing 101–125 of 207 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7575978 | Method for making conductive nanoparticle charge storage element | Brenda D. Kraus | 2009-08-18 |
| 7560815 | Device structures including ruthenium silicide diffusion barrier layers | Brian A. Vaartstra | 2009-07-14 |
| 7521356 | Atomic layer deposition systems and methods including silicon-containing tantalum precursor compounds | Nirmal Ramaswamy, Joel Drewes | 2009-04-21 |
| 7512170 | Method of forming mirrors by surface transformation of empty spaces in solid state materials | Joseph E. Geusic | 2009-03-31 |
| 7473637 | ALD formed titanium nitride films | Brenda D. Kraus | 2009-01-06 |
| 7468108 | Metal layer forming methods and capacitor electrode forming methods | — | 2008-12-23 |
| 7427570 | Porous organosilicate layers, and vapor deposition systems and methods for preparing same | — | 2008-09-23 |
| 7393785 | Methods and apparatus for forming rhodium-containing layers | Stefan Uhlenbrock | 2008-07-01 |
| 7378129 | Atomic layer deposition methods of forming conductive metal nitride comprising layers | Brenda D. Kraus | 2008-05-27 |
| 7365028 | Methods of forming metal oxide and semimetal oxide | — | 2008-04-29 |
| 7291920 | Semiconductor structures | — | 2007-11-06 |
| 7282408 | Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer | Brenda D. Kraus | 2007-10-16 |
| 7271077 | Deposition methods with time spaced and time abutting precursor pulses | Brian A. Vaartstra, Paul Castrovillo, Cem Basceri, Garo Derderian, Gurtej S. Sandhu | 2007-09-18 |
| 7271071 | Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms | — | 2007-09-18 |
| 7262132 | Metal plating using seed film | — | 2007-08-28 |
| 7260125 | Method of forming mirrors by surface transformation of empty spaces in solid state materials | Joseph E. Geusic | 2007-08-21 |
| 7250367 | Deposition methods using heteroleptic precursors | Brian A. Vaartstra, Donald L. Westmoreland, Stefan Uhlenbrock | 2007-07-31 |
| 7226861 | Methods and apparatus for forming rhodium-containing layers | Stefan Uhlenbrock | 2007-06-05 |
| 7217970 | Devices containing platinum-iridium films and methods of preparing such films and devices | — | 2007-05-15 |
| 7214602 | Method of forming a conductive structure | — | 2007-05-08 |
| 7208412 | Method of forming metal oxide and semimetal oxide | — | 2007-04-24 |
| 7189611 | Metal plating using seed film | — | 2007-03-13 |
| 7160817 | Dielectric material forming methods | — | 2007-01-09 |
| 7157783 | Platinum stuffed with silicon oxide as a diffusion oxygen barrier for semiconductor devices | — | 2007-01-02 |
| 7142577 | Method of forming mirrors by surface transformation of empty spaces in solid state materials and structures thereon | Joseph E. Geusic | 2006-11-28 |