Issued Patents All Time
Showing 126–150 of 207 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105065 | Metal layer forming methods and capacitor electrode forming methods | — | 2006-09-12 |
| 7098503 | Circuitry and capacitors comprising roughened platinum layers | — | 2006-08-29 |
| 7078326 | Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor device | — | 2006-07-18 |
| 7060615 | Methods of forming roughened layers of platinum | — | 2006-06-13 |
| 7052953 | Dielectric material forming methods and enhanced dielectric materials | — | 2006-05-30 |
| 6946395 | Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices | — | 2005-09-20 |
| 6943073 | Process for low temperature atomic layer deposition of RH | Stefan Uhlenbrock | 2005-09-13 |
| 6903005 | Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2005-06-07 |
| 6900107 | Devices containing platinum-iridium films and methods of preparing such films and devices | — | 2005-05-31 |
| 6884691 | Method of forming a substrate having a surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms | — | 2005-04-26 |
| 6881260 | Process for direct deposition of ALD RhO2 | Stefan Uhlenbrock | 2005-04-19 |
| 6867093 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2005-03-15 |
| 6867449 | Capacitor having RuSixOy-containing adhesion layers | Brenda D. Kraus | 2005-03-15 |
| 6861355 | Metal plating using seed film | — | 2005-03-01 |
| 6858535 | Methods for patterning metal layers for use with forming semiconductor devices | — | 2005-02-22 |
| 6855928 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2005-02-15 |
| 6844261 | Method of forming ruthenium and ruthenium oxide films on a semiconductor structure | Stefan Uhlenbrock | 2005-01-18 |
| 6840988 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Stefan Uhlenbrock | 2005-01-11 |
| 6830983 | Method of making an oxygen diffusion barrier for semiconductor devices using platinum, rhodium, or iridium stuffed with silicon oxide | — | 2004-12-14 |
| 6813136 | Memory structure with an annealed film | — | 2004-11-02 |
| 6800937 | RuSixOy-containing adhesion layers and process for fabricating the same | Brenda D. Kraus | 2004-10-05 |
| 6800521 | Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-10-05 |
| 6796313 | Methods of cleaning vaporization surfaces | — | 2004-09-28 |
| 6787449 | Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-09-07 |
| 6783657 | Systems and methods for the electrolytic removal of metals from substrates | Stefan Uhlenbrock, Donald L. Westmoreland | 2004-08-31 |