Issued Patents All Time
Showing 201–207 of 207 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6143667 | Method and apparatus for using photoemission to determine the endpoint of an etch process | — | 2000-11-07 |
| 6143085 | Laser desorption of CVD precursor species | — | 2000-11-07 |
| 6133159 | Methods for preparing ruthenium oxide films | Brian A. Vaartstra | 2000-10-17 |
| 6074945 | Methods for preparing ruthenium metal films | Brian A. Vaartstra | 2000-06-13 |
| 6051287 | Laser desorption of CVD precursor species | — | 2000-04-18 |
| 5990559 | Circuitry comprising roughened platinum layers, platinum-containing materials, capacitors comprising roughened platinum layers, methods forming roughened layers of platinum, and methods of forming capacitors | — | 1999-11-23 |
| 5920068 | Analysis of semiconductor surfaces by secondary ion mass spectrometry | — | 1999-07-06 |