Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838114 | Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces | Ross S. Dando, Allen Mardian | 2005-01-04 |
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Allen Mardian, Ross S. Dando, Kimberly Tschepen, Garo Derderian | 2004-11-23 |
| 6814813 | Chemical vapor deposition apparatus | Ross S. Dando, Philip Campbell, Allen Mardian | 2004-11-09 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6797337 | Method for delivering precursors | Ross S. Dando, Allen Mardian, Garo Derderian, Dan Gealy | 2004-09-28 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6736708 | Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies | — | 2004-05-18 |
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Ross S. Dando, Kevin Hamer | 2004-01-13 |
| 6620253 | Engagement mechanism for semiconductor substrate deposition process kit hardware | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2003-09-16 |
| 6620496 | Method of removing surface protrusions from thin films | James J. Alwan | 2003-09-16 |
| 6613587 | Method of replacing at least a portion of a semiconductor substrate deposition chamber liner | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2003-09-02 |
| 6558570 | Polishing slurry and method for chemical-mechanical polishing | James J. Alwan | 2003-05-06 |
| 6468925 | Plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Allen Mardian | 2002-10-22 |
| 6439967 | Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies | — | 2002-08-27 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Allen Mardian | 2002-07-02 |
| 6407499 | Method of removing surface protrusions from thin films | James J. Alwan | 2002-06-18 |
| 6271139 | Polishing slurry and method for chemical-mechanical polishing | James J. Alwan | 2001-08-07 |
| 6054807 | Planarized base assembly and flat panel display device using the planarized base assembly | — | 2000-04-25 |
| 5902491 | Method of removing surface protrusions from thin films | James J. Alwan | 1999-05-11 |