Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953886 | Single-wafer real-time etch rate and uniformity predictor for plasma etch processes | Justin Hiroki Sato, Yannick Carll Kimmel | 2018-04-24 |
| 8853091 | Method for manufacturing a semiconductor die with multiple depth shallow trench isolation | Justin Hiroki Sato, Greg Stom, Robert P. Ma, Walter Lundy | 2014-10-07 |