Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953886 | Single-wafer real-time etch rate and uniformity predictor for plasma etch processes | Justin Hiroki Sato, Brian Hennes | 2018-04-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953886 | Single-wafer real-time etch rate and uniformity predictor for plasma etch processes | Justin Hiroki Sato, Brian Hennes | 2018-04-24 |