Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687066 | Virtual cross metrology-based modeling of semiconductor fabrication processes | — | 2023-06-27 |
| 11113445 | Hotspot detection based on litho-aware machine learning | Jea-Woo Park | 2021-09-07 |
| 9418195 | Layout content analysis for source mask optimization acceleration | Oberdan Otto, Yuri Granik | 2016-08-16 |
| 8843859 | Layout content analysis for source mask optimization acceleration | Oberdan Otto, Yuri Granik | 2014-09-23 |
| 8504959 | Analysis optimizer | William S. Graupp, Mark C. Simmons | 2013-08-06 |
| 8099685 | Model based microdevice design layout correction | Marko P. Chew, Yue Yang | 2012-01-17 |
| 7739650 | Pre-bias optical proximity correction | Andrew Michael Jost, Mark C. Simmons, George P. Lippincott | 2010-06-15 |
| 7562336 | Contrast based resolution enhancement for photolithographic processing | Yuri Granik | 2009-07-14 |
| 7293249 | Contrast based resolution enhancement for photolithographic processing | Yuri Granik | 2007-11-06 |
| 6553562 | Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques | Luigi Capodieci, Lodewijk Hubertus Van Os | 2003-04-22 |