| 10732499 |
Method and system for cross-tile OPC consistency |
— |
2020-08-04 |
| 9811615 |
Simultaneous retargeting of layout features based on process window simulation |
Zhitang Yu, Xima Zhang |
2017-11-07 |
| 8881070 |
Optical proximity correction based on edge fragment correlation |
Junjiang Lei, Le Hong |
2014-11-04 |
| 8806390 |
OPC conflict identification and edge priority system |
— |
2014-08-12 |
| 8788982 |
Layout design defect repair using inverse lithography |
Yuri Granik, Sergey Kobelkov |
2014-07-22 |
| 8533637 |
Retargeting based on process window simulation |
Christopher Edwin John Reid |
2013-09-10 |
| 8352891 |
Layout decomposition based on partial intensity distribution |
Christopher Edwin John Reid, Sergiy Komirenko |
2013-01-08 |
| 8250495 |
Mask decomposition for double dipole lithography |
Sergly M. Komirenko |
2012-08-21 |
| 8185847 |
Pre-bias optical proximity correction |
Juan Andres Torres Robles, Andrew Michael Jost, Mark C. Simmons |
2012-05-22 |
| 7865863 |
OPC conflict identification and edge priority system |
— |
2011-01-04 |
| 7739650 |
Pre-bias optical proximity correction |
Juan Andres Torres Robles, Andrew Michael Jost, Mark C. Simmons |
2010-06-15 |
| 7281234 |
Short edge smoothing for enhanced scatter bar placement |
— |
2007-10-09 |
| 7240305 |
OPC conflict identification and edge priority system |
— |
2007-07-03 |
| 7240321 |
Selective promotion for resolution enhancement techniques |
Nicolas B. Cobb, Laurence W. Grodd, Emile Y. Sahouria |
2007-07-03 |
| 7181721 |
Short edge management in rule based OPC |
Kyohei Sakajiri, Laurence W. Grodd |
2007-02-20 |
| 6973633 |
Caching of lithography and etch simulation results |
Nick Cobb, Robert W. Todd |
2005-12-06 |
| 6857109 |
Short edge smoothing for enhanced scatter bar placement |
— |
2005-02-15 |
| 6817003 |
Short edge management in rule based OPC |
Kyohei Sakajiri, Laurence W. Grodd |
2004-11-09 |
| 6668367 |
Selective promotion for resolution enhancement techniques |
Nicolas B. Cobb, Laurence W. Grodd, Emile Y. Sahouria |
2003-12-23 |
| 6574784 |
Short edge management in rule based OPC |
Kyohei Sakajiri, Laurence W. Grodd |
2003-06-03 |