Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938982 | Silicon wafer etching compositions | Henry F. Erk, Guoqiang Zhang | 2011-05-10 |
| 7846006 | Dressing a wafer polishing pad | Madhavan S. Esayanur, Dennis Buese, Emanuele Corsi, Ezio Bovio, Antonio Maria Rinaldi +1 more | 2010-12-07 |
| 7846007 | System and method for dressing a wafer polishing pad | Madhavan S. Esayanur, Dennis Buese, Emanuele Corsi, Ezio Bovio, Antonio Maria Rinaldi +1 more | 2010-12-07 |
| 7323421 | Silicon wafer etching process and composition | Henry F. Erk, Guoqiang Zhang, Mick Bjelopavlic, Alexis Grabbe, Jozef G. Vermeire +3 more | 2008-01-29 |
| 5417767 | Wafer carrier | — | 1995-05-23 |