Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12350784 | Semiconductor wafer thermal removal control | Ezio Bovio | 2025-07-08 |
| 11707813 | Semiconductor wafer thermal removal control | Ezio Bovio | 2023-07-25 |
| 10960513 | Methods and systems for polishing pad control | Ezio Bovio | 2021-03-30 |
| 10946493 | Methods and systems for polishing pad control | Ezio Bovio | 2021-03-16 |
| 10654145 | Methods and systems for polishing pad control | Ezio Bovio | 2020-05-19 |
| 7846006 | Dressing a wafer polishing pad | Mark Stinson, Madhavan S. Esayanur, Dennis Buese, Ezio Bovio, Antonio Maria Rinaldi +1 more | 2010-12-07 |
| 7846007 | System and method for dressing a wafer polishing pad | Mark Stinson, Madhavan S. Esayanur, Dennis Buese, Ezio Bovio, Antonio Maria Rinaldi +1 more | 2010-12-07 |