Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026145 | Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering | Robert J. Falster, Vladimir V. Voronkov | 2011-09-27 |
| 7485928 | Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering | Robert J. Falster, Vladimir V. Voronkov | 2009-02-03 |
| 5418172 | Method for detecting sources of contamination in silicon using a contamination monitor wafer | Robert J. Falster, Robert A. Craven | 1995-05-23 |