Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7586609 | Method for analyzing overlay errors | Shun-Li Lin, Chen-Fu Chien, Chia-Yu Hsu | 2009-09-08 |
| 7051800 | Hot plate cooling system | Ching-Yu Chang | 2006-05-30 |
| 6887627 | Method of fabricating phase shift mask | Henry Chung, Chi-Yuan Hung, Ching-Yu Chang | 2005-05-03 |
| 6620564 | Method for patterning semiconductors through adjustment of image peak side lobes | Chi-Yuan Hung | 2003-09-16 |
| 6506688 | Method for removing photoresist layer on wafer edge | — | 2003-01-14 |