Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7646906 | Computer-implemented methods for detecting defects in reticle design data | Zain Saidin, Yalin Xiong, Lance Glasser, Carl Hess | 2010-01-12 |
| 7557921 | Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools | Michael Adel, Kevin P. Monahan, Christopher F. Bevis, Ben-ming Benjamin Tsai, Mark Ghinovker | 2009-07-07 |
| 6868301 | Method and application of metrology and process diagnostic information for improved overlay control | — | 2005-03-15 |