| 11967070 |
Systems and methods for automated image analysis |
Hakan Ay |
2024-04-23 |
| 7467363 |
Method for SRAM bitmap verification |
David T. Price, Mark Ward |
2008-12-16 |
| 6784045 |
Microchannel formation for fuses, interconnects, capacitors, and inductors |
David T. Price |
2004-08-31 |
| 6464566 |
Apparatus and method for linearly planarizing a surface of a semiconductor wafer |
Michael Berman |
2002-10-15 |
| 6254456 |
Modifying contact areas of a polishing pad to promote uniform removal rates |
Eric Jacob Jan Kirchner |
2001-07-03 |
| 6093280 |
Chemical-mechanical polishing pad conditioning systems |
Eric Jacob Jan Kirchner |
2000-07-25 |
| 5913715 |
Use of hydrofluoric acid for effective pad conditioning |
Eric Jacob Jan Kirchner |
1999-06-22 |
| 5893756 |
Use of ethylene glycol as a corrosion inhibitor during cleaning after metal chemical mechanical polishing |
Michael Berman |
1999-04-13 |
| 5888121 |
Controlling groove dimensions for enhanced slurry flow |
Eric Jacob Jan Kirchner |
1999-03-30 |
| 5882251 |
Chemical mechanical polishing pad slurry distribution grooves |
Michael Berman |
1999-03-16 |
| 5866031 |
Slurry formulation for chemical mechanical polishing of metals |
Ronald A. Carpio, Rahul Jairath |
1999-02-02 |
| 5835226 |
Method for determining optical constants prior to film processing to be used improve accuracy of post-processing thickness measurements |
Michael Berman, Eric Jacob Jan Kirchner, Thomas F. A. Bibby |
1998-11-10 |
