Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5866031 | Slurry formulation for chemical mechanical polishing of metals | Rahul Jairath, Jayashree Kalpathy-Cramer | 1999-02-02 |
| 5846398 | CMP slurry measurement and control technique | — | 1998-12-08 |
| 5840629 | Copper chemical mechanical polishing slurry utilizing a chromate oxidant | — | 1998-11-24 |
| 5439569 | Concentration measurement and control of hydrogen peroxide and acid/base component in a semiconductor bath | — | 1995-08-08 |
| 5364510 | Scheme for bath chemistry measurement and control for improved semiconductor wet processing | — | 1994-11-15 |
| 5030527 | Radiation cured solid aqueous electrolytes and electrochemical devices employing the same | Denis G. Fauteux | 1991-07-09 |
| 4791296 | Fast method of measuring phosphorous concentration in PSG and BPSG films | — | 1988-12-13 |
| 4764438 | Solid state tetrachloroaluminate storage battery having a transition metal chloride cathode | Robert L. Vaughn, Lowell A. King | 1988-08-16 |