Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5259603 | Device for mounting and transporting substrates in vacuum apparatus | Michael Geisler | 1993-11-09 |
| 5173640 | Apparatus for the production of a regular microwave field | Michael Geisler, Bernhard Kessler | 1992-12-22 |
| 5122636 | Movable device for heating substrates | — | 1992-06-16 |
| 5118549 | Optical recording medium | Alfons Hausler, Rainer Ludwig, Michael Geisler | 1992-06-02 |
| 5113790 | Apparatus for the plasma treatment of substrates | Michael Geisler, Rudolf K. Faulhaber | 1992-05-19 |
| 5006219 | Microwave cathode sputtering arrangement | Rudolf Latz, Michael Scherer, Michael Geisler | 1991-04-09 |
| 4987346 | Particle source for a reactive ion beam etching or plasma deposition installation | Werner Katzschner, Stefan Eichholz, Michael Geisler | 1991-01-22 |
| 4956216 | Optical recording medium | Alfons Hausler, Rainer Ludwig, Michael Geibler | 1990-09-11 |