Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4987346 | Particle source for a reactive ion beam etching or plasma deposition installation | Stefan Eichholz, Michael Geisler, Michael Jung | 1991-01-22 |
| 4869801 | Apparatus for mounting workpieces | Dirk Helms, Anton Pawlakowitsch, Friedrich Anderle | 1989-09-26 |