Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818633 | Equipment front end module for transferring wafers and method of transferring wafers | Thorsten Lill, Vahid Vahedi, Candi Kristoffersen, Andrew D. Bailey, III, Meihua Shen +1 more | 2017-11-14 |