Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang +4 more | 2005-05-24 |
| 6749483 | Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operation | — | 2004-06-15 |
| 6609952 | Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operation | — | 2003-08-26 |