Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5534110 | Shadow clamp | Henry Brumbach | 1996-07-09 |
| 5472565 | Topology induced plasma enhancement for etched uniformity improvement | Randall S. Mundt, David Kerr | 1995-12-05 |
| 5074456 | Composite electrode for plasma processes | Raymond L. Degner | 1991-12-24 |