Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106940 | Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes | Ayaka NISHIYAMA, Chih-Yu Hsu, Peng Shen, Nathan Stafford | 2024-10-01 |
| 11075084 | Chemistries for etching multi-stacked layers | Peng Shen, Keiichiro URABE, Nicolas GOSSET | 2021-07-27 |
| 10529581 | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications | Chih-Yu Hsu, Peng Shen, Takashi TERAMOTO, Nathan Stafford | 2020-01-07 |