Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529581 | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications | Chih-Yu Hsu, Peng Shen, Nathan Stafford, Jiro Yokota | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529581 | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications | Chih-Yu Hsu, Peng Shen, Nathan Stafford, Jiro Yokota | 2020-01-07 |