Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075084 | Chemistries for etching multi-stacked layers | Peng Shen, Keiichiro URABE, Jiro Yokota | 2021-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075084 | Chemistries for etching multi-stacked layers | Peng Shen, Keiichiro URABE, Jiro Yokota | 2021-07-27 |