Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2024-01-23 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |