Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8823935 | Detecting and classifying surface defects with multiple radiation collectors | Steven W. Meeks, Xiaoqian Xu, Hung Phi Nguyen, Mahendra Prabhu Ramachandran | 2014-09-02 |
| 8325334 | Substrate edge inspection | Mahendra Prabhu Ramachandran, Steven W. Meeks, Hung Phi Nguyen | 2012-12-04 |
| 7396022 | System and method for optimizing wafer flatness at high rotational speeds | Vamsi Velidandla | 2008-07-08 |
| 7362425 | Wide spatial frequency topography and roughness measurement | Steven W. Meeks, Mahendra Prabhu Ramachandran | 2008-04-22 |