Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5130261 | Method of rendering the impurity concentration of a semiconductor wafer uniform | Shigeo Yawata, Jun Okano, Shigeru MORIYAMA, Shun-ichi Hiraki | 1992-07-14 |
| 4647472 | Process of producing a semiconductor device | Shunichi Hiraki, Kazuhiro Takimoto | 1987-03-03 |
| 4585489 | Method of controlling lifetime of minority carriers by electron beam irradiation through semi-insulating layer | Shun-ichi Hiraki, Kazuo Tsuru, Yutaka Koshino | 1986-04-29 |