Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5130261 | Method of rendering the impurity concentration of a semiconductor wafer uniform | Yoshikazu Usuki, Shigeo Yawata, Jun Okano, Shigeru MORIYAMA | 1992-07-14 |
| 5015593 | Method of manufacturing semiconductor device | Shigeo Yawata, Kazuhisa Shibao | 1991-05-14 |
| 4585489 | Method of controlling lifetime of minority carriers by electron beam irradiation through semi-insulating layer | Kazuo Tsuru, Yoshikazu Usuki, Yutaka Koshino | 1986-04-29 |