Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5094879 | Method of activating at least one gas to produce different charged species, selecting specific species, decelerating the species, and chemically reacting the species to form a thin film | Haruo Okano, Tokuhisa Ohiwa | 1992-03-10 |
| 4923715 | Method of forming thin film by chemical vapor deposition | Iwao Kunishima | 1990-05-08 |
| 4866009 | Multilayer wiring technique for a semiconductor device | — | 1989-09-12 |