Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7546178 | Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device | Shigeki Nojima, Tatsuhiko Higashiki | 2009-06-09 |
| 7269470 | Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device | Shigeki Nojima, Tatsuhiko Higashiki | 2007-09-11 |
| 7100146 | Design system of alignment marks for semiconductor manufacture | Takashi Sato, Takashi Sakamoto, Yoshiyuki Shioyama, Tatsuhiko Higashiki, Ichiro Mori +1 more | 2006-08-29 |
| 6558852 | Exposure method, reticle, and method of manufacturing semiconductor device | Kazuo Tawarayama | 2003-05-06 |
| 6437858 | Aberration measuring method, aberration measuring system and aberration measuring mask | Hiroshi Nomura, Tatsuhiko Higashiki | 2002-08-20 |
| 6163376 | Alignment apparatus, aberration measuring method and aberration measuring mark | Hiroshi Nomura | 2000-12-19 |