Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7478347 | Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus | Hiromi Yajima, Tatsumi Suganuma, Noriaki Yoshikawa, Kenji Nakata | 2009-01-13 |
| 7065725 | Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus | Hiromi Yajima, Tatsumi Suganuma, Noriaki Yoshikawa, Kenji Nakata | 2006-06-20 |
| 6422247 | Pod and method of cleaning it | Noriaki Yoshikawa, Terumi Muguruma, Yoshitaka Hasegawa, Yuichi Kuroda | 2002-07-23 |
| 6267123 | Pod and method of cleaning it | Noriaki Yoshikawa, Terumi Muguruma, Yoshitaka Hasegawa, Yuichi Kuroda | 2001-07-31 |
| 6123120 | Clean storage equipment for substrates and method of storing substrates | Terumi Muguruma, Noriaki Yoshikawa, Yuichi Kuroda | 2000-09-26 |