Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926029 | Wafer container | Kiyotaka Inoue, Yuichi Kuroda, Noriaki Yoshikawa | 2005-08-09 |
| 6883539 | Wafer container | Kiyotaka Inoue, Yuichi Kuroda, Noriaki Yoshikawa | 2005-04-26 |
| 6422247 | Pod and method of cleaning it | Noriaki Yoshikawa, Tadashi Yotsumoto, Yoshitaka Hasegawa, Yuichi Kuroda | 2002-07-23 |
| 6267123 | Pod and method of cleaning it | Noriaki Yoshikawa, Tadashi Yotsumoto, Yoshitaka Hasegawa, Yuichi Kuroda | 2001-07-31 |
| 6123120 | Clean storage equipment for substrates and method of storing substrates | Tadashi Yotsumoto, Noriaki Yoshikawa, Yuichi Kuroda | 2000-09-26 |
| 5294292 | Plasma ashing method | Eiji Yamashita | 1994-03-15 |