Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179133 | Chemical solution supply system and chemical solution supply method | Toshiyuki MURANAKA | 2024-12-31 |
| 10317330 | Particle measuring apparatus | Masaki Hirano | 2019-06-11 |
| 9885648 | Particle detecting apparatus | Masaki Hirano, Kenichi Otsuka | 2018-02-06 |
| 9885649 | Particle measuring apparatus and particle measuring method | Masaki Hirano, Kenichi Otsuka | 2018-02-06 |
| 9691648 | Particle supply device and particle supply method | Masaki Hirano | 2017-06-27 |
| 6926029 | Wafer container | Kiyotaka Inoue, Terumi Muguruma, Noriaki Yoshikawa | 2005-08-09 |
| 6883539 | Wafer container | Kiyotaka Inoue, Terumi Muguruma, Noriaki Yoshikawa | 2005-04-26 |
| 6422247 | Pod and method of cleaning it | Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yoshitaka Hasegawa | 2002-07-23 |
| 6267123 | Pod and method of cleaning it | Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yoshitaka Hasegawa | 2001-07-31 |
| 6123120 | Clean storage equipment for substrates and method of storing substrates | Tadashi Yotsumoto, Terumi Muguruma, Noriaki Yoshikawa | 2000-09-26 |
| 5381140 | Aircraft position monitoring system | Yoshikatsu Mizuna | 1995-01-10 |
| 5196855 | Secondary surveillance radar system | — | 1993-03-23 |
| 4719465 | Monopulse radar equipment | — | 1988-01-12 |